Preparation and Properties of Amorphous Silicon in a Rotary Plasma Isolated Reactor

Preparation and Properties of Amorphous Silicon in a Rotary Plasma Isolated Reactor

Research output: Contribution to conference › Paper

Original language	American English
Pages	523-527
Number of pages	5
State	Published - 1985
Event	Eighteenth IEEE Photovoltaic Specialists Conference-1985 - Las Vegas, Nevada Duration: 21 Oct 1985 → 25 Oct 1985

Conference

Conference	Eighteenth IEEE Photovoltaic Specialists Conference-1985
City	Las Vegas, Nevada
Period	21/10/85 → 25/10/85

Bibliographical note

Work performed by Spire Corporation, Bedford, Massachusetts

NREL Publication Number

ACNR/CP-7818

Cite this

@conference{9daee89290894f4e8e0b31a155608dfc,

title = "Preparation and Properties of Amorphous Silicon in a Rotary Plasma Isolated Reactor",

author = "NREL",

note = "Work performed by Spire Corporation, Bedford, Massachusetts; Eighteenth IEEE Photovoltaic Specialists Conference-1985 ; Conference date: 21-10-1985 Through 25-10-1985",

year = "1985",

language = "American English",

pages = "523--527",

}