Preparation of a-Si:H and a-SiGe:H nip Cells at High Rates Using a 70 MHz VHF PECVD Technique

Research output: Contribution to conferencePaper

Original languageAmerican English
Pages303-308
Number of pages6
StatePublished - 1999
EventNCPV Photovoltaics Program Review: 15th Conference - Denver, Colorado
Duration: 9 Sep 199811 Sep 1998

Conference

ConferenceNCPV Photovoltaics Program Review: 15th Conference
CityDenver, Colorado
Period9/09/9811/09/98

Bibliographical note

Work performed by Energy Conversion Devices, Inc., Troy, Michigan

NREL Publication Number

  • NREL/CP-520-27403

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