Preparation of Amorphous Electrochromic Tungsten Oxide and Molybdenum Oxide by Plasma Enhanced Chemical Vapor Deposition

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	2377-2383
Number of pages	7
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	4
Issue number	5
DOIs	https://doi.org/10.1116/1.574080
State	Published - 1986

NREL Publication Number

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title = "Preparation of Amorphous Electrochromic Tungsten Oxide and Molybdenum Oxide by Plasma Enhanced Chemical Vapor Deposition",

author = "NREL",

year = "1986",

doi = "10.1116/1.574080",

language = "American English",

volume = "4",

pages = "2377--2383",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "5",

}

TY - JOUR

T1 - Preparation of Amorphous Electrochromic Tungsten Oxide and Molybdenum Oxide by Plasma Enhanced Chemical Vapor Deposition

AU - NREL, null

PY - 1986

Y1 - 1986

U2 - 10.1116/1.574080

DO - 10.1116/1.574080

M3 - Article

SN - 0734-2101

VL - 4

SP - 2377

EP - 2383

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 5

ER -