Preparation of Solar-Grade Amorphous Silicon from Fluorinated Silanes

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)195-203
    Number of pages9
    JournalSolar Cells
    Volume21
    Issue numberComplete
    DOIs
    StatePublished - 1987

    Bibliographical note

    Work performed by Dow Corning Corporation, Midland, Michigan

    NREL Publication Number

    • ACNR/JA-9350

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