Principle of a New Reflectometer for Measuring Dielectric Film Thickness on Substrates of Arbitrary Surface Characteristics

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	725-727
Number of pages	3
Journal	Review of Scientific Instruments
Volume	59
Issue number	5
DOIs	https://doi.org/10.1063/1.1139817
State	Published - 1988

NREL Publication Number

@article{c0183c3276fb46158bda41695aae8f89,

title = "Principle of a New Reflectometer for Measuring Dielectric Film Thickness on Substrates of Arbitrary Surface Characteristics",

author = "NREL",

year = "1988",

doi = "10.1063/1.1139817",

language = "American English",

volume = "59",

pages = "725--727",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics",

number = "5",

}