| Original language | American English |
|---|---|
| Patent number | 4,614,564 |
| State | Published - 1986 |
NLR Publication Number
- ACNR/PT-213-8959
Process for Selectively Patterning Epitaxial Film Growth on a Semiconductor Substrate
- NREL (Inventor)
Research output: Patent
Research output: Patent
| Original language | American English |
|---|---|
| Patent number | 4,614,564 |
| State | Published - 1986 |