Process-Property Relationships for a-Si1-xCx:H Deposition: Excursions in Parameter Space Guided by Real Time Spectroellipsometry

Process-Property Relationships for a-Si1-xCx:H Deposition: Excursions in Parameter Space Guided by Real Time Spectroellipsometry

Research output: Contribution to conference › Paper

Original language	American English
Pages	595-600
Number of pages	6
State	Published - 1994
Event	Amorphous Silicon Technology 1994: Materials Research Society Symposium - San Francisco, California Duration: 4 Apr 1994 → 8 Apr 1994

Conference

Conference	Amorphous Silicon Technology 1994: Materials Research Society Symposium
City	San Francisco, California
Period	4/04/94 → 8/04/94

Bibliographical note

Work performed by the Materials Research Laboratory, Department of Electrical Engineering and Department of Physics, Pennsylvania State University, University Park, Pennsylvania

NREL Publication Number

ACNR/CP-16066

Cite this

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title = "Process-Property Relationships for a-Si1-xCx:H Deposition: Excursions in Parameter Space Guided by Real Time Spectroellipsometry",

author = "NREL",

note = "Work performed by the Materials Research Laboratory, Department of Electrical Engineering and Department of Physics, Pennsylvania State University, University Park, Pennsylvania; Amorphous Silicon Technology 1994: Materials Research Society Symposium ; Conference date: 04-04-1994 Through 08-04-1994",

year = "1994",

language = "American English",

pages = "595--600",

}

TY - CONF

T1 - Process-Property Relationships for a-Si1-xCx:H Deposition: Excursions in Parameter Space Guided by Real Time Spectroellipsometry

AU - NREL, null

N1 - Work performed by the Materials Research Laboratory, Department of Electrical Engineering and Department of Physics, Pennsylvania State University, University Park, Pennsylvania

PY - 1994

Y1 - 1994

M3 - Paper

SP - 595

EP - 600

T2 - Amorphous Silicon Technology 1994: Materials Research Society Symposium

Y2 - 4 April 1994 through 8 April 1994

ER -