| Original language | American English |
|---|---|
| Pages (from-to) | 2803-2807 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 12 |
| Issue number | 5 |
| DOIs | |
| State | Published - 1994 |
NREL Publication Number
- ACNR/JA-15792
Research output: Contribution to journal › Article
| Original language | American English |
|---|---|
| Pages (from-to) | 2803-2807 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 12 |
| Issue number | 5 |
| DOIs | |
| State | Published - 1994 |