Production of High-Quality Amorphous Silicon Films by Evaporative Silane Decomposition

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)3215-3223
    Number of pages9
    JournalJournal of Applied Physics
    Issue number6
    StatePublished - 1988

    Bibliographical note

    Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado, and National Bureau of Standards, Boulder, Colorado

    NREL Publication Number

    • ACNR/JA-10631

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