Production of High-Quality Amorphous Silicon Films by Evaporative Silane Decomposition

Research output: Contribution to journal › Article

Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado, and National Bureau of Standards, Boulder, Colorado

NREL Publication Number

@article{d8b0fffa92f6433c90c4eaf82668feea,

title = "Production of High-Quality Amorphous Silicon Films by Evaporative Silane Decomposition",

author = "NREL",

note = "Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado, and National Bureau of Standards, Boulder, Colorado",

year = "1988",

doi = "10.1063/1.341539",

language = "American English",

volume = "64",

pages = "3215--3223",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "6",

}

TY - JOUR

T1 - Production of High-Quality Amorphous Silicon Films by Evaporative Silane Decomposition

AU - NREL, null

N1 - Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado, and National Bureau of Standards, Boulder, Colorado

PY - 1988

Y1 - 1988

U2 - 10.1063/1.341539

DO - 10.1063/1.341539

M3 - Article

SN - 0021-8979

VL - 64

SP - 3215

EP - 3223

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 6

ER -