@article{ffc3c6756d1949a5aa62c0767e838734,
title = "Properties of Hydrogenated Amorphous Silicon Prepared by Chemical Vapor Deposition",
author = "NREL",
note = "Work performed by Department of Chemistry and Division of Applied Sciences, Harvard University, Cambridge, Massachusetts",
year = "1984",
doi = "10.1063/1.333042",
language = "American English",
volume = "55",
pages = "4309--4317",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics",
number = "12",
}