Properties of Intrinsic a-Si:H Films Deposited from Higher Order Silanes by Chemical Vapor Deposition

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Number of pages6
    StatePublished - 1985
    EventMRS Spring Meeting - San Francisco, California
    Duration: 15 Apr 198518 Apr 1985


    ConferenceMRS Spring Meeting
    CitySan Francisco, California

    Bibliographical note

    Work performed by University of Delaware, Institute of Energy Conversion, Newark, Delaware

    NREL Publication Number

    • ACNR/CP-6689

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