Properties of the Interface Between Amorphous Silicon and Nitride

Properties of the Interface Between Amorphous Silicon and Nitride

Research output: Contribution to conference › Paper

Original language	American English
Pages	351-359
Number of pages	9
State	Published - 1986
Event	Materials Research Society Spring Meeting - Palo Alto, California Duration: 15 Apr 1986 → 18 Apr 1986

Conference

Conference	Materials Research Society Spring Meeting
City	Palo Alto, California
Period	15/04/86 → 18/04/86

Bibliographical note

Work performed by Xerox Palo Alto Research Center, Palo Alto, California

NREL Publication Number

ACNR/CP-8309

Cite this

@conference{0ce88018cfa848cdb1b9a0335c21e5b2,

title = "Properties of the Interface Between Amorphous Silicon and Nitride",

author = "NREL",

note = "Work performed by Xerox Palo Alto Research Center, Palo Alto, California; Materials Research Society Spring Meeting ; Conference date: 15-04-1986 Through 18-04-1986",

year = "1986",

language = "American English",

pages = "351--359",

}