Pulsed Laser Deposition of Oriented V2O5 Thin Films

Jeanne M. McGraw, John D. Perkins, Falah Hasoon, Philip A. Parilla, Chollada Warmsingh, David S. Ginley, Eli Mateeva, Dennis W. Readey

Research output: Contribution to journalArticlepeer-review

24 Scopus Citations


We have found that by varying only the substrate temperature and oxygen pressure five different crystallographic orientations of V2O5 thin films can be grown, ranging from amorphous to highly textured crystalline. Dense, phase-pure V2O5 thin films were grown on SnO2/glass substrates and amorphous quartz substrates by pulsed laser deposition over a wide range of temperatures and oxygen pressures. The films' microstructure, crystallinity, and texturing were characterized by electron microscopy, x-ray diffraction, and Raman spectroscopy. Temperature and oxygen pressure appeared to play more significant roles in the resulting crystallographic texture than did the choice of substrate. A growth map summarizes the results and delineates the temperature and O2 pressure window for growing dense, uniform, phase-pure V2O5 films.

Original languageAmerican English
Pages (from-to)2249-2265
Number of pages17
JournalJournal of Materials Research
Issue number10
StatePublished - 2000

NREL Publication Number

  • NREL/JA-520-29546


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