Quality and Growth Rate of Hot-Wire Chemical Vapor Deposition Epitaxial Si Layers: Paper No. 1066-A11-06

Research output: Contribution to conferencePaper

Original languageAmerican English
Pages285-289
Number of pages5
StatePublished - 2008
EventAmorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2008: Materials Research Society Symposium - San Francisco, California
Duration: 25 Mar 200828 Mar 2008

Conference

ConferenceAmorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2008: Materials Research Society Symposium
CitySan Francisco, California
Period25/03/0828/03/08

NREL Publication Number

  • NREL/CP-520-43193

Keywords

  • HWCVD
  • silicon films
  • solar cells

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