Quantification of Sheet Resistance in Boron-Diffused Silicon Using Micro-Photoluminescence Spectroscopy at Room Temperature

Steven Johnston, Steven Harvey, Mowafak Al-Jassim, Hieu Nguyen, Appu Paduthol, Sieu Phang, Christian Samundsett, Chang Sun, Di Yan, Thorsten Trupke, Daniel Macdonald

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