| Original language | American English |
|---|---|
| Pages (from-to) | 1123-1128 |
| Number of pages | 6 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 2 |
| Issue number | 2, Part II |
| DOIs | |
| State | Published - 1984 |
NREL Publication Number
- ACNR/JA-213-3533