| Original language | American English |
|---|---|
| Pages (from-to) | 2412-2416 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 5 |
| Issue number | 4, Part IV |
| DOIs | |
| State | Published - 1987 |
NREL Publication Number
- ACNR/JA-255-8199