Radical Species in Argon-Silane Discharges

Research output: Contribution to journal › Article

Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado, and National Bureau of Standards, Boulder, Colorado

NREL Publication Number

@article{3207425f35e64a2ebb1ec85384022dfa,

title = "Radical Species in Argon-Silane Discharges",

author = "NREL",

note = "Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado, and National Bureau of Standards, Boulder, Colorado",

year = "1983",

doi = "10.1063/1.94413",

language = "American English",

volume = "43",

pages = "544--546",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "6",

}

TY - JOUR

T1 - Radical Species in Argon-Silane Discharges

AU - NREL, null

N1 - Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado, and National Bureau of Standards, Boulder, Colorado

PY - 1983

Y1 - 1983

U2 - 10.1063/1.94413

DO - 10.1063/1.94413

M3 - Article

SN - 0003-6951

VL - 43

SP - 544

EP - 546

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 6

ER -