Raman Study of Thin Films from Amorphous-to-Microcrystalline Silicon Prepared by Hot-Wire Chemical Vapor Deposition

    Research output: Contribution to journalArticlepeer-review

    Original languageAmerican English
    Pages (from-to)2930-2936
    Number of pages7
    JournalJournal of Applied Physics
    Volume94
    Issue number5
    DOIs
    StatePublished - 2003

    NREL Publication Number

    • NREL/JA-520-33802

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