Rapid, Non-contact Method for Measurement of Si Wafer Thickness: Principles and Preliminary Results

Research output: Contribution to conference › Paper

Original language	American English
Pages	225-234
Number of pages	10
State	Published - 2003
Event	13th Workshop on Crystalline Silicon Solar Cell Materials and Processes - Vail, Colorado Duration: 10 Aug 2003 → 13 Aug 2003

Conference	13th Workshop on Crystalline Silicon Solar Cell Materials and Processes
City	Vail, Colorado
Period	10/08/03 → 13/08/03

NREL Publication Number

@conference{5bb76df9d96d472fb19ef4e15bb76066,

title = "Rapid, Non-contact Method for Measurement of Si Wafer Thickness: Principles and Preliminary Results",

author = "NREL",

year = "2003",

language = "American English",

pages = "225--234",

note = "13th Workshop on Crystalline Silicon Solar Cell Materials and Processes ; Conference date: 10-08-2003 Through 13-08-2003",

}