Rapid Thermal Annealing of Hot Wire Chemical-Vapor-Deposited a-Si:H Films: The Effect of the Film Hydrogen Content on the Crystallization Kinetics, Surface Morphology, and Grain Growth

A. H. Mahan, B. Roy, R. C. Reedy, D. W. Readey, D. S. Ginley

Research output: Contribution to journal › Article › peer-review

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