Rapid Thermal Annealing of Hot Wire Chemical-Vapor-Deposited a-Si:H Films: The Effect of the Film Hydrogen Content on the Crystallization Kinetics, Surface Morphology, and Grain Growth

  • A. H. Mahan
  • , B. Roy
  • , R. C. Reedy
  • , D. W. Readey
  • , D. S. Ginley

Research output: Contribution to journal › Article › peer-review

29 Scopus Citations

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