Rapid Thermal Processing by Stamping

Pauls Stradins (Inventor)

Research output: Patent


A rapid thermal processing device and methods are provided for thermal processing of samples such as semiconductor wafers. The device has components including a stamp having a stamping surface and a heater or cooler to bring it to a selected processing temperature, a sample holder for holding a sample in position for intimate contact with the stamping surface; and positioning components formoving the stamping surface and the stamp in and away from intimate, substantially non-pressured contact. Methods for using and making such devices are also provided. These devices and methods allow inexpensive, efficient, easily controllable thermal processing.
Original languageAmerican English
Patent number8,389,422
Filing date5/03/13
StatePublished - 2013

Bibliographical note

Assignee: Alliance for Sustainable Energy, LLC (Golden, CO)

NREL Publication Number

  • NREL/PT-5200-62012


Dive into the research topics of 'Rapid Thermal Processing by Stamping'. Together they form a unique fingerprint.

Cite this