@article{2497d99e2af34ec7bb3db7eb95e7a827,
title = "Reaction Mechanism and Kinetics of Silane Pyrolysis on a Hydrogenated Amorphous Silicon Surface",
author = "NREL",
note = "Work performed by Joint Institute for Laboratory Astrophysics; University of Colorado and National Bureau of Standards, Boulder, Colorado",
year = "1986",
doi = "10.1063/1.450933",
language = "American English",
volume = "85",
pages = "3623--3630",
journal = "The Journal of Chemical Physics",
issn = "0021-9606",
publisher = "American Institute of Physics",
number = "6",
}