Reaction Mechanism and Kinetics of Silane Pyrolysis on a Hydrogenated Amorphous Silicon Surface

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)3623-3630
    Number of pages8
    JournalThe Journal of Chemical Physics
    Issue number6
    StatePublished - 1986

    Bibliographical note

    Work performed by Joint Institute for Laboratory Astrophysics; University of Colorado and National Bureau of Standards, Boulder, Colorado

    NREL Publication Number

    • ACNR/JA-9550

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