Reactive Sputtering of Amorphous In-Zn-O TCO from Metallic Targets

Arrelaine Dameron, Andriy Zakutayev, Thomas Gennett, David Ginley, John Perkins

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Pages1168-1169
    Number of pages2
    DOIs
    StatePublished - 2013
    Event2013 IEEE 39th Photovoltaic Specialists Conference (PVSC) - Tampa, Florida
    Duration: 16 Jun 201321 Jun 2013

    Conference

    Conference2013 IEEE 39th Photovoltaic Specialists Conference (PVSC)
    CityTampa, Florida
    Period16/06/1321/06/13

    NREL Publication Number

    • NREL/CP-5200-57942

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