| Original language | American English |
|---|---|
| Patent number | 4,649,859 |
| State | Published - 1987 |
NREL Publication Number
- ACNR/PT-213-9409
Reactor Design for Uniform MOCVD-Grown Films Without Substrate Rotation
NREL (Inventor)
Research output: Patent
NREL (Inventor)
Research output: Patent
| Original language | American English |
|---|---|
| Patent number | 4,649,859 |
| State | Published - 1987 |