Real Time Spectroscopic Ellipsometry Studies of the Growth of Amorphous and Epitaxial Silicon for Photovoltaic Applications

Dean Levi

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
Pages (from-to)1676-1683
Number of pages8
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number4
StatePublished - 2006

NREL Publication Number

  • NREL/JA-520-38939

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