Real Time Spectroscopic Ellipsometry Studies of the Growth of Amorphous and Epitaxial Silicon for Photovoltaic Applications

Research output: Contribution to journal › Article › peer-review

Original language	American English
Pages (from-to)	1676-1683
Number of pages	8
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	24
Issue number	4
DOIs	https://doi.org/10.1116/1.2167083
State	Published - 2006

NLR Publication Number

@article{2e65517a1e1e420d9fbc50e5e192ed47,

title = "Real Time Spectroscopic Ellipsometry Studies of the Growth of Amorphous and Epitaxial Silicon for Photovoltaic Applications",

author = "Dean Levi",

year = "2006",

doi = "10.1116/1.2167083",

language = "American English",

volume = "24",

pages = "1676--1683",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "4",

}

TY - JOUR

T1 - Real Time Spectroscopic Ellipsometry Studies of the Growth of Amorphous and Epitaxial Silicon for Photovoltaic Applications

AU - Levi, Dean

PY - 2006

Y1 - 2006

U2 - 10.1116/1.2167083

DO - 10.1116/1.2167083

M3 - Article

SN - 0734-2101

VL - 24

SP - 1676

EP - 1683

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 4

ER -