Reduction of Surface States on GaAs by the Plasma Growth of Oxyfluorides

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)434-437
    Number of pages4
    JournalJournal of vacuum science & technology
    Issue number2
    StatePublished - 1982

    Bibliographical note

    Work performed by Solar Energy Research Institute, Golden, Colorado, and Los Alamos National Laboratory, Los Alamos, New Mexico

    NREL Publication Number

    • ACNR/JA-213-4260

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