@article{c967d68224ad435b9b75565cd1d943f8,
title = "Reduction of Surface States on GaAs by the Plasma Growth of Oxyfluorides",
author = "NREL",
note = "Work performed by Solar Energy Research Institute, Golden, Colorado, and Los Alamos National Laboratory, Los Alamos, New Mexico",
year = "1982",
doi = "10.1116/1.571672",
language = "American English",
volume = "21",
pages = "434--437",
journal = "Journal of vacuum science & technology",
issn = "0022-5355",
publisher = "American Institute of Physics",
number = "2",
}