Abstract
The reflectance spectrum of a wafer/solar cell is used to measure physical parameters of the wafer and its structural components and interfaces. New applications of the reflectometer have been developed, which enable determination of the average parameters over the entire wafer/cell, as well as their spatial mapping. Measurements can be made in less than 100 ms. This method is well suited forcommercial monitoring of solar cell processing.
Original language | American English |
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Number of pages | 5 |
State | Published - 2005 |
Event | 2004 DOE Solar Energy Technologies Program Review Meeting - Denver, Colorado Duration: 25 Oct 2004 → 28 Oct 2004 |
Conference
Conference | 2004 DOE Solar Energy Technologies Program Review Meeting |
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City | Denver, Colorado |
Period | 25/10/04 → 28/10/04 |
Bibliographical note
Presented at the 2004 DOE Solar Energy Technologies Program Review Meeting, 25-28 October 2004, Denver, Colorado. Also included in the proceedings available on CD-ROM (DOE/GO-102005-2067; NREL/CD-520-37140)NREL Publication Number
- NREL/CP-520-37061
Keywords
- antireflection coatings
- fabrication
- PV
- rapid quantitative measurements
- reflectance spectroscopy
- solar cells
- wafers
- wavelength