Reflectance Spectroscopy: Rapid Quantitative Measurements in Commercial Production of Si Solar Cells

Research output: Contribution to conferencePaper

Abstract

The reflectance spectrum of a wafer/solar cell is used to measure physical parameters of the wafer and its structural components and interfaces. New applications of the reflectometer have been developed, which enable determination of the average parameters over the entire wafer/cell, as well as their spatial mapping. Measurements can be made in less than 100 ms. This method is well suited forcommercial monitoring of solar cell processing.
Original languageAmerican English
Number of pages5
StatePublished - 2005
Event2004 DOE Solar Energy Technologies Program Review Meeting - Denver, Colorado
Duration: 25 Oct 200428 Oct 2004

Conference

Conference2004 DOE Solar Energy Technologies Program Review Meeting
CityDenver, Colorado
Period25/10/0428/10/04

Bibliographical note

Presented at the 2004 DOE Solar Energy Technologies Program Review Meeting, 25-28 October 2004, Denver, Colorado. Also included in the proceedings available on CD-ROM (DOE/GO-102005-2067; NREL/CD-520-37140)

NREL Publication Number

  • NREL/CP-520-37061

Keywords

  • antireflection coatings
  • fabrication
  • PV
  • rapid quantitative measurements
  • reflectance spectroscopy
  • solar cells
  • wafers
  • wavelength

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