Original language | American English |
---|---|
Pages | 301-312 |
Number of pages | 12 |
State | Published - 1990 |
Event | Advanced Metallizations in Microelectronics: Materials Research Society Symposium - San Francisco, California Duration: 16 Apr 1990 → 20 Apr 1990 |
Conference
Conference | Advanced Metallizations in Microelectronics: Materials Research Society Symposium |
---|---|
City | San Francisco, California |
Period | 16/04/90 → 20/04/90 |
Bibliographical note
This paper also appears in MRS Symposium Proceedings, Vol. 184 (See CP-11966)NREL Publication Number
- ACNR/CP-213-11630