| Original language | American English |
|---|---|
| Pages | 301-312 |
| Number of pages | 12 |
| State | Published - 1990 |
| Event | Advanced Metallizations in Microelectronics: Materials Research Society Symposium - San Francisco, California Duration: 16 Apr 1990 → 20 Apr 1990 |
Conference
| Conference | Advanced Metallizations in Microelectronics: Materials Research Society Symposium |
|---|---|
| City | San Francisco, California |
| Period | 16/04/90 → 20/04/90 |
Bibliographical note
This paper also appears in MRS Symposium Proceedings, Vol. 184 (See CP-11966)NLR Publication Number
- ACNR/CP-213-11630