Residual Stress and the Effect of Implanted Argon in Films of Zirconium Nitride Made by Physical Vapor Deposition

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)1446-1452
    Number of pages7
    JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
    Issue number4
    StatePublished - 1992

    NREL Publication Number

    • ACNR/JA-14237

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