RF-Sputtered ITO and ITO:Zr Studied by In Situ Spectroscopic Ellipsometry

Research output: Contribution to conference › Paper

Original language	American English
Pages	002408-002412
Number of pages	5
DOIs	https://doi.org/10.1109/PVSC.2010.5614289
State	Published - 2010
Event	35th IEEE Photovoltaic Specialists Conference (PVSC '10) - Honolulu, Hawaii Duration: 20 Jun 2010 → 25 Jun 2010

Conference	35th IEEE Photovoltaic Specialists Conference (PVSC '10)
City	Honolulu, Hawaii
Period	20/06/10 → 25/06/10

NLR Publication Number

@conference{e08e41d2867e436b98e64f2d9af2228f,

title = "RF-Sputtered ITO and ITO:Zr Studied by In Situ Spectroscopic Ellipsometry",

keywords = "sputter deposition, transparent conducting oxides",

author = "Timothy Gessert and Dean Levi and Timothy Coutts and James Burst and Timothy Peshek and XiaoNan Li and Sharon Weiss and Bridget Rogers",

year = "2010",

doi = "10.1109/PVSC.2010.5614289",

language = "American English",

pages = "002408--002412",

note = "35th IEEE Photovoltaic Specialists Conference (PVSC \'10) ; Conference date: 20-06-2010 Through 25-06-2010",

}

TY - CONF

T1 - RF-Sputtered ITO and ITO:Zr Studied by In Situ Spectroscopic Ellipsometry

AU - Gessert, Timothy

AU - Levi, Dean

AU - Coutts, Timothy

AU - Burst, James

AU - Peshek, Timothy

AU - Li, XiaoNan

AU - Weiss, Sharon

AU - Rogers, Bridget

PY - 2010

Y1 - 2010

KW - sputter deposition

KW - transparent conducting oxides

U2 - 10.1109/PVSC.2010.5614289

DO - 10.1109/PVSC.2010.5614289

M3 - Paper

SP - 2408

EP - 2412

T2 - 35th IEEE Photovoltaic Specialists Conference (PVSC '10)

Y2 - 20 June 2010 through 25 June 2010

ER -