Roughness, Impurities and Strain in Low-Temperature Epitaxial Silicon Films Grown by Tantalum Filament Hot-Wire Chemical Vapor Deposition: Paper no. 0910-A15-01

Research output: Contribution to conferencePaper

Original languageAmerican English
Pages343-352
Number of pages10
StatePublished - 2006
EventAmorphous and Polycrystalline Thin-Film Silicon Science and Technology: Materials Research Society Symposium - San Francisco, California
Duration: 18 Apr 200621 Apr 2006

Conference

ConferenceAmorphous and Polycrystalline Thin-Film Silicon Science and Technology: Materials Research Society Symposium
CitySan Francisco, California
Period18/04/0621/04/06

NREL Publication Number

  • NREL/CP-520-39776

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