Roughness, Impurities and Strain in Low-Temperature Epitaxial Silicon Films Grown by Tantalum Filament Hot-Wire Chemical Vapor Deposition: Paper no. 0910-A15-01

NREL

    Research output: Contribution to conference › Paper

    Original languageAmerican English
    Pages343-352
    Number of pages10
    StatePublished - 2006
    EventAmorphous and Polycrystalline Thin-Film Silicon Science and Technology: Materials Research Society Symposium - San Francisco, California
    Duration: 18 Apr 2006 → 21 Apr 2006

    Conference

    ConferenceAmorphous and Polycrystalline Thin-Film Silicon Science and Technology: Materials Research Society Symposium
    CitySan Francisco, California
    Period18/04/06 → 21/04/06

    NREL Publication Number

    • NREL/CP-520-39776

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