Saturated Defect Densities of Hydrogenated Amorphous Silicon Grown by Hot-Wire Chemical Vapor Deposition at Rates up to 150 A/s

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
Pages (from-to)3788-3790
Number of pages3
JournalApplied Physics Letters
Volume78
Issue number24
DOIs
StatePublished - 2001

NREL Publication Number

  • NREL/JA-520-31099

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