Saturated Defect Densities of Hydrogenated Amorphous Silicon Grown by Hot-Wire Chemical Vapor Deposition at Rates up to 150 A/s

A. H. Mahan, Y. Xu, B. P. Nelson, R. S. Crandall, J. D. Cohen, K. C. Palinginis, A. C. Gallagher

Research output: Contribution to journalArticlepeer-review

27 Scopus Citations

Fingerprint

Dive into the research topics of 'Saturated Defect Densities of Hydrogenated Amorphous Silicon Grown by Hot-Wire Chemical Vapor Deposition at Rates up to 150 A/s'. Together they form a unique fingerprint.

Engineering

Material Science

Chemical Engineering