Scanning Capacitance Spectroscopy on N+-P Asymmetrical Junctions in Multicrystalline Si Solar Cells

We report on a scanning capacitance spectroscopy (SCS) study on the n ⁺-p junction of multicrystalline silicon solar cells. We found that the spectra taken at space intervals of ∼10 nm exhibit characteristic features that depend strongly on the location relative to the junction. The capacitance-voltage spectra exhibit a local minimum capacitance value at the electrical junction, which allows the junction to be identified with ∼10-nm resolution. The spectra also show complicated transitions from the junction to the n-region with two local capacitance minima on the capacitance-voltage curves; similar spectra to that have not been previously reported in the literature. These distinctive spectra are due to uneven carrier-flow from both the n- and p-sides. Our results contribute significantly to the SCS study on asymmetrical junctions.