Scanning Kelvin Probe Microscopy: A Tool to Investigate Nano-Scale Doping Non-Uniformities in Poly-Si/SiOx Contacts: Preprint

Abhijit Kale, Sanjini Nanayakkara, William Nemeth, Harvey Guthrey, Matthew Page, Mowafak Al-Jassim, David Young, Paul Stradins, Sumit Agarwal

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