Semiconductor Device PN Junction Fabrication using Optical Processing of Amorphous Semiconductor Material

Anikara Rangappan (Inventor)

    Research output: Patent

    Abstract

    Systems and methods for semiconductor device PN junction fabrication are provided. In one embodiment, a method for fabricating an electrical device having a P-N junction comprises: depositing a layer of amorphous semiconductor material onto a crystalline semiconductor base, wherein the crystalline semiconductor base comprises a crystalline phase of a same semiconductor as the amorphous layer; and growing the layer of amorphous semiconductor material into a layer of crystalline semiconductor material that is epitaxially matched to the lattice structure of the crystalline semiconductor base by applying an optical energy that penetrates at least the amorphous semiconductor material.
    Original languageAmerican English
    Patent number8,895,416 B2
    Filing date25/11/14
    StatePublished - 2014

    Bibliographical note

    Assignee: Alliance for Sustainable Energy, LLC (Golden, CO)

    NREL Publication Number

    • NREL/PT-5J00-64493

    Keywords

    • device fabrication
    • PN junction
    • semiconductors

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