Semiconductor Processing with Excimer Lasers

Semiconductor Processing with Excimer Lasers

NREL

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	183-189
Number of pages	7
Journal	Solid State Technology
Volume	26
Issue number	11
State	Published - 1983

Bibliographical note

Work performed by Helionetics, Inc., San Diego, California; Oak Ridge National Laboratory, Oak Ridge, Tennessee; Jet Propulsion Laboratory, Pasadena, California; and Solar Energy Research Institute, Golden, Colorado

NLR Publication Number

ACNR/JA-5119

Cite this

@article{0810f4271aec464db13125f31197f91b,

title = "Semiconductor Processing with Excimer Lasers",

author = "NREL",

note = "Work performed by Helionetics, Inc., San Diego, California; Oak Ridge National Laboratory, Oak Ridge, Tennessee; Jet Propulsion Laboratory, Pasadena, California; and Solar Energy Research Institute, Golden, Colorado",

year = "1983",

language = "American English",

volume = "26",

pages = "183--189",

journal = "Solid State Technology",

issn = "0038-111X",

publisher = "Pennwell Corporation",

number = "11",

}

TY - JOUR

T1 - Semiconductor Processing with Excimer Lasers

AU - NREL, null

N1 - Work performed by Helionetics, Inc., San Diego, California; Oak Ridge National Laboratory, Oak Ridge, Tennessee; Jet Propulsion Laboratory, Pasadena, California; and Solar Energy Research Institute, Golden, Colorado

PY - 1983

Y1 - 1983

M3 - Article

SN - 0038-111X

VL - 26

SP - 183

EP - 189

JO - Solid State Technology

JF - Solid State Technology

IS - 11

ER -