Abstract
The objective of this program is to identify and develop low cost processing for fabricating large grain size polycrystalline silicon substrates. Metallurgical grade silicon (MG-Si) is chosen as the starting material for sequential purification and crystal growth. As shown in the previous two technical reports, several purification techniques have been studied. They include (l) acid leaching withHCl, (2) physical separation of insoluble impurities, (3) reactive gas treatment of molten silicon, and (4) slagging using a mixed-oxide slag. In this quarterly period purification by vacuum treatment and by impurity redistribution using ingot pulling has been studied.
Original language | American English |
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Number of pages | 32 |
State | Published - 1980 |
Bibliographical note
Work performed by Motorola, Inc., Phoenix, ArizonaNREL Publication Number
- SERI/SR-20258
Other Report Number
- DOE/SERI-8119-3/2-T6
Keywords
- crystal growth
- metallurgical grade silicon
- silicon substrates