Shallow Melt Apparatus for Semicontinuous Czochralski Crystal Growth

NREL (Inventor)

    Research output: Patent

    Abstract

    In a single crystal pulling apparatus for providing a Czochralski crystal growth process, the improvement of a shallow melt crucible (20) to eliminate the necessity supplying a large quantity of feed stock materials that had to be preloaded in a deep crucible to grow a large ingot, comprising a gas tight container a crucible with a deepened periphery (25) to prevent snapping of a shallow melt andreduce turbulent melt convection; source supply means for adding source material to the semiconductor melt; a double barrier (23) to minimize heat transfer between the deepened periphery (25) and the shallow melt in the growth compartment; offset holes (24) in the double barrier (23) to increase melt travel length between the deepened periphery (25) and the shallow growth compartment; and theinterface heater/heat sink (22) to control the interface shape and crystal growth rate.
    Original languageAmerican English
    Patent number6,984,263 B2
    StatePublished - 2006

    NREL Publication Number

    • NREL/PT-520-39542

    Keywords

    • semiconductor melt
    • semicontinuous Czochralski crystal growth
    • shallow melt apparatus

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