Significant Improvement in Silicon Chemical Vapor Deposition Epitaxy Above the Surface Dehydrogenation Temperature: Article No. 093520

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
Number of pages5
JournalJournal of Applied Physics
Volume100
Issue number9
DOIs
StatePublished - 2006

NREL Publication Number

  • NREL/JA-520-41028

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