Silane Discharge Gas and Surface Reactions

Silane Discharge Gas and Surface Reactions

Research output: Contribution to conference › Paper

Original language	American English
Pages	99-110
Number of pages	12
State	Published - 1984
Event	MRS Fall Meeting - Boston, Massachusetts Duration: 26 Nov 1984 → 30 Nov 1984

Conference

Conference	MRS Fall Meeting
City	Boston, Massachusetts
Period	26/11/84 → 30/11/84

Bibliographical note

Work performed by Quantum Physics Division, National Bureau of Standards, Boulder, Colorado

NREL Publication Number

ACNR/CP-6695

Cite this

@conference{02b575b8564a4912a6af341bb7d2c072,

title = "Silane Discharge Gas and Surface Reactions",

author = "NREL",

note = "Work performed by Quantum Physics Division, National Bureau of Standards, Boulder, Colorado; MRS Fall Meeting ; Conference date: 26-11-1984 Through 30-11-1984",

year = "1984",

language = "American English",

pages = "99--110",

}