Silicon Epitaxy at ~100 nm/min by Hot-Wire Chemical Vapor Deposition at Glass-Compatible Temperatures

Research output: Contribution to conferencePaper

Original languageAmerican English
Pages152-155
Number of pages4
StatePublished - 2006
Event15th Workshop on Crystalline Silicon Solar Cells and Modules: Materials and Processes - Denver, Colorado
Duration: 6 Aug 20069 Aug 2006

Conference

Conference15th Workshop on Crystalline Silicon Solar Cells and Modules: Materials and Processes
CityDenver, Colorado
Period6/08/069/08/06

NREL Publication Number

  • NREL/CP-520-40426

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