Silicon Epitaxy at ~100 nm/min by Hot-Wire Chemical Vapor Deposition at Glass-Compatible Temperatures

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Pages152-155
    Number of pages4
    StatePublished - 2006
    Event15th Workshop on Crystalline Silicon Solar Cells and Modules: Materials and Processes - Denver, Colorado
    Duration: 6 Aug 20069 Aug 2006

    Conference

    Conference15th Workshop on Crystalline Silicon Solar Cells and Modules: Materials and Processes
    CityDenver, Colorado
    Period6/08/069/08/06

    NREL Publication Number

    • NREL/CP-520-40426

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