Silicon Oxynitride Thin Film Barriers for PV Packaging (Poster)

Research output: NRELPoster


Dielectric, adhesion-promoting, moisture barriers comprised of silicon oxynitride thin film materials (SiOxNy with various material stoichiometric compositions x,y) were applied to: 1) bare and pre-coated soda-lime silicate glass (coated with transparent conductive oxide SnO2:F and/or aluminum), and polymer substrates (polyethylene terephthalate, PET, or polyethylene napthalate, PEN); plus 2)pre- deposited photovoltaic (PV) cells and mini-modules consisting of amorphous silicon (a-Si) and copper indium gallium diselenide (CIGS) thin-film PV technologies. We used plasma enhanced chemical vapor deposition (PECVD) process with dilute silane, nitrogen, and nitrous oxide/oxygen gas mixtures in a low-power (< or = 10 milliW per cm2) RF discharge at~0.2 Torr pressure, and low substratetemperatures < or = 100 deg C, over deposition areas~1000 cm2. Barrier properties of the resulting PV cells and coated-glass packaging structures were studied with subsequent stressing in damp-heat exposure at 85(degrees)C/85% RH. Preliminary results on PV cells and coated glass indicate the palpable benefits of the barriers in mitigating moisture intrusion and degradation of theunderlying structures using SiOxNy coatings with thicknesses in the range of 100-200 nm.
Original languageAmerican English
StatePublished - 2006

Publication series

NamePrepared for the CU-NREL Research Symposium, 3 October 2006, Boulder, Colorado

Bibliographical note

01/19/07: Electronic files archived by publications services. Contact author for additional information.

NREL Publication Number

  • NREL/PO-5200-40682


  • moisture barriers
  • PV cells
  • silicon oxynitride
  • thin films


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