Similarities in Chemical Intermixing at the Cu/InP and Cu/Si Interfaces

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)564-569
    Number of pages6
    JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
    Volume1
    Issue number3
    DOIs
    StatePublished - 1983

    Bibliographical note

    Work performed by Stanford Electronics Laboratories, Stanford University, Stanford, California

    NREL Publication Number

    • ACNR/JA-4075

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