@article{4cf12e332ae8451d8d1a78b0ff294541,
title = "Similarities in Chemical Intermixing at the Cu/InP and Cu/Si Interfaces",
author = "NREL",
note = "Work performed by Stanford Electronics Laboratories, Stanford University, Stanford, California",
year = "1983",
doi = "10.1116/1.582599",
language = "American English",
volume = "1",
pages = "564--569",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "0734-211X",
publisher = "AVS Science and Technology Society",
number = "3",
}