@article{3250c3fb200a4751aece75e8811285e7,
title = "Simple Method for Preparing Hydrogenated Amorphous Silicon Films by Chemical Vapor Deposition at Atmospheric Pressure",
author = "NREL",
note = "Work performed by Department of Chemistry, Harvard University, Cambridge, Massachusetts",
year = "1983",
doi = "10.1063/1.332717",
language = "American English",
volume = "54",
pages = "5381--5384",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics",
number = "9",
}