Single-Step Non-Thermal Plasma Synthesis of 3C-SiC Nanoparticles

Pauls Stradins, Rohan Chaukulkar, Koen Peuter, Jacob Ghodes, Svitlana Pylypenko, Jacqueline Cloud, Yongan Yang, Sumit Agarwal

Research output: Contribution to journalArticlepeer-review

5 Scopus Citations


Wepresent a scalable, single-step, non-thermal plasma synthesis technique for the growth of sub-5 nm, hydrogenated amorphous carbon (a-C:H) coated 3C-SiC nanoparticles (NPs). In a tubular flow reactor, we first nucleate and grow c-Si NPs upstream in a SiH4/Ar plasma. These c-Si NPs are then transported by gas flow to a downstreamC2H2/Ar plasma, and carburized in-flight by carbon-containing radicals and ions to 3C-SiC NPs. X-ray diffraction and transmission electron microscopy indicate anNPsize of∼4 nm. X-ray photoelectron spectroscopy analysis confirms that the c-Si NPs are completely carburized to 3C-SiC. Fourier transform infrared spectroscopy shows that the surface of the 3C-SiC NPs is coated with a-C:H with some alkenyl termination, which can facilitate further solution-based surface functionalization for biomedical applications.

Original languageAmerican English
Article numberArticle No. 015019
Number of pages8
JournalMaterials Research Express
Issue number1
StatePublished - Jan 2015

Bibliographical note

Publisher Copyright:
© 2015 IOP Publishing Ltd.

NREL Publication Number

  • NREL/JA-5J00-65755


  • 3C-SiC nanoparticles
  • Fluorescent markers
  • Non-thermal plasma


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